Measurement of humidity is crucial for numerous areas such as textile mills, sawmills, agriculture or hydrometeorology. Some specifications of commercial humidity sensors could not sufficiently meet customer requirements considering accuracy, repeatibility, durability, resistance to chemical and physical contaminants or long-term stability. One of the biggest issues is the reliability of the signal recording, as many of the sensors are not able to fully recover after condensation and deposition of impurities. This requires additional costs connected with recalibrations and even sensor replacement. Our solution offers sensors with superior reliability at temperatures above 80°C and 90% relative humidity.